CYBOR M7500<= o:p>
The next step in Positive
D=
isplacement
Technology
The CYBOR M7500 has taken the
semiconductor industry’s most widely used and trusted pump and has
further enhanced its control, and versatility.
The M7500 pump has enhanced volu=
me accuracy
and repeatability with new high resolution stepper motor control software.
Volume repeatability is now up to 0=
.01mL. The user-selectable variable rate recipe has been demonstrat=
ed
to reduce the volume of resist used.
The M7500 excels in mid-range
viscosity, low volume dispense control. The dispense rate acceleration and
deceleration is easily configured to minimize fluid instability (water hamm=
er)
at the critical end of the dispense. The acceler=
ation
/ deceleration when applied between steps of the variable rate provide a
predictable and smooth transition between rates.
The M7500 pump is configured wit=
h an
on-board single pump controller. This new approach allows a reduced
cost-per-dispense point. The on-board single pump controller is compatible =
with
the industry standard CYBOR control architecture. Pump control is executed
through the host process tool using discrete signals or RS232 / 485 serial
communications.
Eight recipes, each with indepen=
dently
programmable volumes and rates are programmable in milliliters and seconds.
Active recipe selections are made through either communication protocol or
discrete signals.
The M7500 CYBOR pump is configur=
ed
for use with popular mems, packaging and bump
technology photo-chemicals.