Chemical Management Solutions
IDI-CYBOR can supply comple=
te
Chemical
Management Solutions, from =
Bulk
Delivery
t=
o Waste Evacuation
With our comprehensive selection=
of
fluid handling products, systems can be easily configured to meet each
customer’s requirements.
Bulk Pumping Module (BPM II=
I) is engineered to supply bulk chemicals from large source
containers to remote points of use. Source containers range from 55 gallon
drums to 250 gallon totes with source
switching=
capability, and pumping rates up to 15 GPM.
Sources can be housed in IDI-CYB=
OR
Safety Storage Modules or in storage rooms. BPMs are
available in coated steel, stainless steel, and poly construction.
Valve Manifold Box (VMB) is designed to match the advanced capabilities of the Bulk Pum=
ping
Module. The VMB provides a safe and simple solution for in fab
chemical distribution. Available in stainless steel and poly construction,
these small footprint enclosures are easily wall or floor mounted. Availabl=
e with
three to sixteen individually controlled outlet ports. Point of use shut off
and optional pressure sensing aid in bulk delivery to point of use enclosur=
es.
Chemical Delivery System (C=
DS) provides point of use storage and delivery. The CDS is enginee=
red
to meet Semiconductor Specification. The CDS is then easily configured to m=
eet
internal EH&S and local codes. PLC controls for easy operation and
configurable to meet a variety of uses. Local storage for photo chemicals as
well as pressurized canisters from 1 to 5 gallon (20 Liters) can be
accommodated. Canister configurations for manual or bulk fill are available.
The CDS provides a modular stainless steel design. Starting from the base
module (31” W x 23” D X 75”H), the system can be expanded=
to
meet the customers specific needs.
Reservoir (ADS 500) =
and Controller (ADS 510) provide a reliable means of adding Air
Removal and Source Switching to new or existing pumps. The fully automated
reservoir increases system utilization and uptime with virtually no operator
assistance.