The IDI M310 POD Pump
The Multiple Output Dispense
System
The IDI-M310 Series Pressure-On-Demand Pump, POD, technology pu=
mp
provides automated dispense control for Develop, Edge Bead Removal, (EBR), =
and
Solvent Pre-wet process. The IDI-CYBOR patented POD provides bubble free,
uniform flow rates that far exceed any results from a pressurized canister.=
The
units have no mechanical displacement and are engineered to dispense a vari=
ety
of photolithography chemicals.
The IDI-M310 pump is configurable
with one to three outputs. The outputs can be operated sequentially or
simultaneously. The volumes are independently programmable.
The IDI-M310 pump uses Pulse Wid=
th
Modulation to control the pressurization of the driver gas that displaces t=
he
photo chemical.
The pressure “servo
loop” provides a constant photochemical flow regardless of the number=
of
outputs valves open or filter loading. The pump system will not allow itsel=
f to
run out of photo chemical making it impossible to introduce air into the
dispense lines.
The user friendly controller can
control operations of up to four IDI-M300 pumps. Each M310 series pump can
dispense up to three dispense points simultaneously. Chemistry is supplied =
to
each M310 from up to two sources, depending on user specification. The
controller offers a flexible software interface for specifying parameters a=
nd
monitoring and controlling operations. All dispense parameters are digitally
controlled and have access code protection.