The IDI M450 POD Pump

Pressure-On-Demand Technolo= gy

Using IDI-CYBOR’s patented Pressure-On-Demand, POD, techn= ology, the M450 pump provides superior dispense control for troublesome fluids suc= h as anti-reflective coatings, ARC, BARC, and TARC. The troublesome foaming and micro bubbling is eliminated. The unique design of the M450’s reservo= ir with its top fill and bottom extraction design allows the natural separatio= n of entrapped air bubbles. This natural separation is further enhanced by the M= 450 ability to be programmed to rest at idle mode with a user selectable pressu= re or vacuum setting. This idle mode setting can be set to further decrease the amount of foaming. The yield is a Micro-Bubble free dispense.

The M450 meets your demands for reliability. No other pump in the industry is virtually maintenance free as= the IDI M450 POD pump. The superior designs of the M450 pump allows for simple = and clean operation. The fluid path of the M450 pump is injection molded PFA Teflon® with virtually moving parts.

The IDI M450 pump requires no external controller for daily operations. The on board pump control card provides the necessary pump controls

and process tool interface functions. The M450 is easily programm= ed with the patented ChemLink software. A single s= imple connection of the 9

pin serial connector allows remote programming from your desk top= or at the host tool with a laptop computer. The provided = ChemNet software is Windows-based, for user friendly programming and maintenance. S= imple fill-in-the-box allows for quick and error-free recipes. The variable rate dispense is programmed easily in pressure and time. Test and maintenance functions are setup and executed from the ChemNet maintenance program.

The IDI-M450 pumps flexibility allows use with other photo chemicals up to 100 cP in viscosity. Integrated support for Now Technologies PNP Smart Probe™ m= eets the process protection required in many of today’s fabs. The host tool interface selection is user selectable using the ChemNet software.=

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