MIME-Version: 1.0 Content-Location: file:///C:/94775AD0/TheIDIM550.htm Content-Transfer-Encoding: quoted-printable Content-Type: text/html; charset="us-ascii" The IDI M550

The IDI M550=

 

For SOG and Low K Chemistri= es

 

For nearly a decade, IDI-CYBOR have = been the leaders in innovative chemical dispense solutions. Based upon the field proven Pressure-On-Demand Technology, IDI-CYBOR introduces the M550 chemical dispense system for Spin on Glass (SOG) and Low K Dielectric applications.<= o:p>

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Using IDI’s patented pressure on demand (POD) technol= ogy, the M550 provides superior particle reduction, dispense accuracy, chemical minimization characterization, and high reliabi= lity in a compact design. With an MTBF of over 1 million dispenses with no sched= ule maintenance, IDI is continuing to lead the industry in quality and superior technology.

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P= ressure on Demand using Helium

• Hel= ium pressure on demand (POD) is utilized to push the chemical through the system out on to the wafer

• Thr= ough the manipulation of time and pressure, extremely accurate dispense volumes = are achieved

• Usi= ng POD, chemicals themselves are not subjected to any sort of mechanical force= s

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S= uperior Particle Reduction

Many of today’s SOG and Low K chemical dispense systems for lithography track systems simply use a regulated pressurize vessel to dispense SOG and Low K chemicals onto the wafer. This strategy promotes the crystallization of SOG= and particles within the pressurized vessel and through out the dispense lines.= By using the M550, IDI customers have dramatically reduced particles and surfa= ce defects by virtually eliminating the possibility of SOG crystallization.

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R= eduction in Chemical Usage

By utilizing the variable rate dispense capability of the M550, a dramatic reduction of chemical can be realized. Variable rate offers four different dispense rates per recipe.

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B= uilt-In Reliability

The M550 me= ets your demands and requirements for reliability. Our dedication to being the = best shows through the M550’s superior features:

• Pre= cise variable rate chemical dispense every time

• Virtually no moving parts to break down

• CE certified

• Micro-bubble free dispenses

• Low= er chemical consumption during filter change out

• Mul= tiple footprints to optimize space utilization

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F= lexibility

The M550 has the integrated support of Now Technologies PNP SmartPr= obe TM to meet the process protection needs of the fab. This chemical dispense system is controlled by sophisticated electronics th= at are driven by detailed, user friendly software for easier integration with proc= ess equipment.

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The standard Model 550 will easily integrate with most track systems for greater flexibility. We’ve worked to create a system that is flexible and acc= ommodating to a wide range of tubing and standard industry filters.<= /p>