CHEMICAL DELIVERY SYSTEM (CDS)
The Point of Use Chemical
Delivery System (CDS) is engineered to provide safe, convenient storage of
source containers and process pumps.
Modular construction of the CDS =
allows
ease of configuration to meet both the operational and space requirements of
the end user. The modular components are easily assembled to provide an
integrated package which helps lower the overall cost of ownership. Enginee=
red
to meet Semiconductor Specification, the CDS is then easily configured to m=
eet
internal EH&S and local codes.
Within the CDS, modular construc=
tion
of the hardware leads to flexibility in application and operation and allows
for numerous combinations of
process
Solvent applications are
incorporated through pressurized canisters in 1 to 5 gallon sizes, with eit=
her
bulk fill or point of use configurations.
Develop applications in either
solvent or aqueous chemistries are implemented with the use of Teflon® lined canisters or plastic carbo=
ys.
All canisters include multi level fluid detection. Interfacing to the Pumps,
Liquid Level Monitoring, Source Switching, Temperature Control and Bulk Fill
are available as options.
The Point of Use CDS has the
functionality to meet the needs of most applications.
PLC Controls provide for maximum
reliability and flexibility allowing IDI-CYBOR to quickly configure the CDS
with the end user desired features at the time of order, or in the field as
changes in process chemistry and parameters occur. A variety of user interf=
aces
are available. The flat panel display with our own GUI (Graphic User Interf=
ace)
provides the ultimate in simplicity while maximizing the information presen=
ted.
PLC controls provide up to 128 I/O ports which minimize the use of point to
point wiring, thus increasing reliability and minimizing service.