CHEMICAL DELIVERY SYSTEM (CDS)
T=
he
Point of Use Chemical Delivery System (CDS) is engineered to provide safe, =
convenient
storage of source containers and process pumps.
<= o:p>
Modular
construction of the CDS allows ease of configuration to meet both the
operational and space requirements of the end user. The modular components =
are
easily assembled to provide an integrated package which helps lower the ove=
rall
cost of ownership. Engineered to meet Semiconductor Specification, the CDS =
is
then easily configured to meet internal EH&S and local codes.
Within the =
CDS,
modular construction of the hardware leads to flexibility in application an=
d operation
and allows for numerous combinations of
process pumps and source
containers.
Solvent
applications are incorporated through pressurized canisters in 1 to 5 gallon
sizes, with either bulk fill or point of use configurations.
Develop
applications in either solvent or aqueous chemistries are implemented with =
the
use of Teflon® lined
canisters or plastic carboys. All canisters include multi level fluid
detection. Interfacing to the Pumps, Liquid Level Monitoring, Source Switch=
ing,
Temperature Control and Bulk Fill are available as options.
The Point of
Use CDS has the functionality to meet the needs of most applications.
PLC Controls provide for maximum reliability and flexibility allowing IDI-CYBOR to quick= ly configure the CDS with the end user desired features at the time of order, = or in the field as changes in process chemistry and parameters occur. A variet= y of user interfaces are available. The flat panel display with our own GUI (Gra= phic User Interface) provides the ultimate in simplicity while maximizing the in= formation presented. PLC controls provide up to 128 I/O ports which minimize the use = of point to point wiring, thus increasing reliability and minimizing service.<= o:p>