CYBOR M5000 Series Pump
The CYBOR M5000 Series Pump=
Po=
sitive
Displacement Technology
The fully programmable, stepper motor driven, electro-hydraulic, CYBORPUMP™ Sys= tem provides the Accuracy, Repeatability, and Versatility required for the most demanding requirements in the Semiconductor and Substrate Processing Industries. The Programmable Photoresist / Polyimide Pumps prov= ide accurate and repeatable performance for viscosities from 1 cp to 3,000 cp.<= o:p>
ACCURATE AND REPEATABLE
The Stepper Motor Drive System in
combination with a Positive Displacement Hydraulic Coupling can provide
repeatability of +/- 0.01 ml.
This accuracy is maintainable ov=
er
hundreds of thousands of dispenses. One study by a customer shows a total r=
ange
variation of 0.03 grams over 250,000 cycles.
VERSATILE
A variety of Stepper Motor
configurations, along with complete digital control of all parameters, allo=
ws
hardware and software design modifications to meet a variety of challenging
dispensing applications.
Very low viscosity chemistries s=
uch
as Deep UV Resist, and Anti-Reflective chemistri=
es can
be dispensed at high rates without the usual dripping and suckback
problems. Dosing profiles can be tailored to fit a variety of approaches to
Reduced Resist Consumption.
RELIABLE
Accelerated life testing has
demonstrated that the pumps are capable of cycling over 1,000,000 times. Th=
is
would mean that the Mean Time Between maintenance could conservatively be e=
stablished
at 600,000 cycles.