Model 650 High Viscosity Pump
The Intelligent Pump for Hi=
gh
Viscosity Dispense
Enhanced performance in=
a
smaller footprint. The M650 has a 17% smaller
footprint than the M600 with enhanced operational and programming capabilit=
y.
The M650 is designed to dispense high viscosity semiconductor processing
chemicals from resist to polyimides to BCB’s as high as 50,000 cP=
.
The CYBOR M650 HVP combines stepper motor technology with state of the art
hardware and software control technology to deliver a superior, repeatable =
high
viscosity pump solution.
The CYBOR M650 uses patented
software control technology to monitor and control the dispense operation.
Enhancements in software allow for quick process tool interface selection. =
With
a simple icon selection the M650 pump auto configures the Trigger,
Dispense/EOD, Ready, Error, and Warning signals. The M650 has expanded the =
on
board recipe library. Now up to 8 recipes can be user selected thru discrete
wiring or RS232/485 serial communications port.
What the M650 HVP can do that no
other high viscosity pumps can do:
• Dramatic reduction in ti=
me
to prime and purge
• Automatic setup with min=
imal
operator intervention
• Software feedback provid=
es
real time diagnostic information of the pump’s operation
• Significant reduction in
waste during fluid change and PM=
s
Dual trigger capability allows f=
or
pre-dispense and process dispense volumes. Each can be individually program=
med.
The patented advanced statistical
algorithms can literally anticipates out of control conditions before they
occur. After dispense volumes are “programmed” the pump will
automatically compensate for any changes in the pump’s mechanical
operation, assuring a consistent, repeatable volume. In addition, you’=
;ll
find the benefits of dependable, trouble-free operation.
CYBOR’s<=
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modular design of the M650 allows for the quick and easy separation of the pump chamber assembly from the mechanical portion of t=
he
pump. Efficient maintenance can be performed without breaking into the fluid
path of the pump, thus eliminating the risk of introducing air into the lin=
es. Using the Model 650 HVP ensures =
that
you’ll be using the best designed and technologically advanced high
viscosity dispense unit in the industry.