=
The CYBOR M7000
=
The next step in Positive Displacement Technolog=
y
The CYBOR M7000 has taken the
semiconductor industry’s most widely used and trusted pump and has
further enhanced its control, and versatility.
The M7000 pump has enhanced vol=
ume
accuracy and repeatability with new high resolution stepper motor control s=
oftware.
Volume repeatability is now up to 0.01mL 3 Sigma. =
=
The user-selectable variable ra=
te
recipe has been demonstrated to reduce the volume of resist used. The M7000
excels in low viscosity, low volume dispense control. The dispense rate acc=
eleration
and deceleration is easily configured to minimize fluid instability (water
hammer) at the critical end of dispense. The acceleration/deceleration rate
adjustment, when applied between steps of the variable rate, provides a
predictable and smooth transition between rates. No more “water
hammer” related defects with low viscosities.
=
The M7000 pump is configured wi=
th an
on-board single pump controller. This new approach allows a reduced
cost-per-dispense point. The on-board single pump controller is compatible =
with
the industry standard CYBOR control architecture. Pump control is executed through th=
e host
process tool using discrete signals or=
RS232
/485 serial communications. <=
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/span>
Eight recipes, eac=
h with
independently programmable volumes and rates are programmable in milliliters
and seconds. Active recipe selections are made through either communication=
protocol
or discrete signals.
=
The M7000 CYBOR pump is availab=
le in a
High Purity version to comply with Semi Spec E 49.