Valve Manifold Box
The Valve Manifold Box (VMB=
) as
part of the Chemical Management Solution provides local distribution of bulk
supplied liquid chemicals.
The VMB can be completely integr=
ated
into a fab wide distribution system with direct
communication to any BPM, Blending System, Chemical Delivery System, or oth=
er
process tools.
The Valve Manifold Box, available
with 3 to 16 outputs, distributes bulk supplied chemicals to local point of=
use
tools. Downtime for refilling canisters is eliminated, freeing up valuable
technician time for other needed functions.
The VMB is directly controlled v= ia the process tool using a pneumatic signal. Our qualified engineering staff = can aid in determining the appropriate signals. The Valve Manifold Box can incorporate both pressure and flow sensors to alert process tools or fab wide monitoring system on the status of the VMB.<= o:p>
Valve Manifold Boxes are offered=
in
a variety of configurations and sizes to meet your chemical needs. Availabl=
e in
1/4” to 1” valve sizes, the air operated 2-way valves provide s=
afe
reliable performance. All Valve Manifold Boxes come standard with a manual =
shutoff
valve.
VMB’s=
are available in stainless or coated steel and poly construct=
ion,
and available stand alone floor or wall mounted units. All have sight windo=
ws
for internal viewing. A sample port for in
situ chemical monitoring is optional.