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M310
Feature
M300
M310
M450
M450 DV
M550
Primary Chemicals
Photoresist
Solvent Developer
Photoresist
Photoresist
SOG, FOX, SILK, DE
Viscosity Range
0-300 cps
0-300 cps
0-300 cps
0-100 cps
0-300 cps
Max Dispense Volume
425 ml
850 ml
75 ml
75 ml
75 ml
Drive Gas
Nitrogen
Nitrogen
Nitrogen
Nitrogen
Helium/Argon
# of outputs
Up to 3
Up to 3
1
1
1
On board Source Switching
Yes
Yes
No
No
No
Internal Reservoir
Yes
Yes
Yes
Yes
Yes
Controller
External Controller Required
External Controller Required
On Board Controller requires PC to Connect
On Board Controller requires PC to Connect
On Board Controller requires PC to Connect
External Controller
Up to 4 pumps
Up to 4 pumps
N/A
N/A
N/A
Near Zero Loss (Prime Purge)
Yes
Yes
Yes
Yes
Yes
Dispense Detection
No
No
No
No
No
In Track Repair
No
No
No
No
No
Multiple Filter Option
Yes
Yes
Yes
Yes
Yes
Standard Line Size
1/4" input/output
1/4" input/output
1/8, 3/16, 1/4, 4mm, 6mm
1/8, 3/16, 1/4, 4mm, 6mm
1/8, 3/16, 1/4, 4mm, 6mm
Feature
M5000
M7500
M7750-HV
HVP M610/650
Primary Chemicals
Photoresist
Photoresist
High Viscosity Photoresist
High Viscosity Photoresist & Polyimides
Viscosity Range
0-3,000 cps
100-3,000 cps
100-12,000 cps
300-30,000 cps
Max Dispense Volume
16 ml
16 ml
16 ml
20 ml & 45 ml
Drive Gas
N/A
N/A
N/A
N/A
# of outputs
1
1
1
1
On board Source Switching
No
No
No
No
Internal Reservoir
No
No
No
No
Controller
External Controller Required
On Board Controller requires PC to Connect
On Board Controller requires PC to Connect
On Board Controller requires PC to Connect
Up to 4 pumps
N/A
N/A
N/A
Near Zero Loss (Prime Purge)
No
No
No
No
Dispense Detection
No
No
No
Yes
Multiple Filter Option
Yes
Yes
Yes
For viscosities < 8000 cps
Standard Line Size
1/4, 3/8
1/4, 3/8
1/2
3/8, 1/2
M310