Accuracy
IDI can accommodate many different Metrology Sensors depending on the
Accuracy required and best method to use per application.
| Metrology |
Typical Applications |
Relative Cost |
| Conductivity |
HF, NH4OH, post-CMP cleans |
Low |
| PH |
Slurries, post-CMP cleans |
Low |
| Density |
Slurries |
Medium |
| Refractometer |
H2O2 |
High |
| Titration |
TMAH, H2O2 in slurries |
High
|
